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thermochemical nanolithography
Thermochemical nanolithography (TCNL) or ''thermochemical scanning probe lithography'' (tc-SPL) is a scanning probe microscopy-based nanolithography technique which triggers thermally activated chemical reactions to change the chemical functionality or the phase of surfaces. Chemical changes can be written very quickly through rapid probe scanning, since no mass is transferred from the tip to the surface, and writing speed is limited only by the heat transfer rate. TCNL has demonstrated to produce local chemical changes with feature sizes down to 12 nm at scan speeds up to 1 mm/s.
In 2013, a group at the Georgia Institute of Technology used TCNL to create a nano-scale replica of the Mona Lisa "painted" with different probe tip temperatures. Called the ''Mini Lisa'', the portrait measured , about 1/25,000th the size of the original.〔Carroll, A.K. G.; Wang, D.; Kodali, V.; Scrimgeour, J.; King, W.; Marder, S.; Riedo, E.;Curtis, J., Fabricating Nanoscale Chemical Gradients with ThermoChemicalNanoLithography, Langmuir, 29 (2013) 8675–8682.〕
== Technique ==
The AFM thermal cantilevers are generally made from a silicon wafers using traditional bulk and surface micro-machining processes. Through the application of an electric current through its highly doped silicon wings, resistive heating occurs at the light doping zone around the probe tip, where the largest fraction of the heat is dissipated. The tip is able to change its temperature very quickly due to its small volume; an average tip in contact with polycarbonate has a time constant of 0.35 ms. The tips can be cycled between ambient temperature and 1100 °C at up to 10 MHz while the distance of the tip from the surface and the tip temperature can be controlled independently.
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